Anandtech has posted a great article looking at Intel's 0.09 micron process, which will be used next year for the Prescott (Pentium 4 successor) and later on the Madison (3rd gen Itanium) processors.

There has been a lot of talk about AMD's forthcoming Hammer processor but very little time is devoted to its imminent competitor - Prescott. Intel's Prescott core will be a relatively major upgrade to the Pentium 4 platform; the chip will bring higher clock speeds, a 1MB L2 cache, Hyper Threading and new instructions to the Pentium 4. Many of these enhancements will be made possible through the use of a new manufacturing process for the transistors that make up the Prescott core.

Full article here